TEM In-Situ Electrical Testing of a FIB-prepared BaTiO3 Ceramic Base Metal Electrode Capacitor

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TEM In-Situ Electrical Testing of a FIB-prepared BaTiO3 Ceramic Base Metal Electrode Capacitor

High reliability capacitors require a dielectric layer with both high electrical resistivity and high static dielectric constant. The most commonly used material platform for low cost, base metal electrode capacitors (BME) consists of nickel electrodes and barium titanate-based dielectric layers. Barium titanate (BaTiO3) is ferroelectric material with dielectric constant that depends on factors...

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ژورنال

عنوان ژورنال: Microscopy and Microanalysis

سال: 2014

ISSN: 1431-9276,1435-8115

DOI: 10.1017/s1431927614010009